@article{ref1,
title="Gaseous Impurities in Co Silicidation: Impact and Solutions",
journal="Journal of the Electrochemical Society",
year="2001",
author="Li, H. and Vereecke, G. and Maex, K. and Froyen, L.",
volume="148",
number="6",
pages="G344-G354",
abstract="<p>[Abstract unavailable]</p><p>Language: en</p>",
language="en",
issn="0013-4651",
doi="10.1149/1.1372213",
url="http://dx.doi.org/10.1149/1.1372213"
}