@article{ref1,
title="Suicide formation from laser thermal processing of Ti/Co bilayers",
journal="Electrochemical and Solid-State Letters",
year="2004",
author="Chow, F.L. and Pey, K.L. and Lee, P.S. and Tung, C.H. and Wang, X.C. and Lim, G.C. and Chong, Y.F.",
volume="7",
number="10",
pages="G213-G215",
abstract="A bilayered CoTi suicide structure consisting of an amorphous CoTi suicide and a highly textured CoTi silicide was found after pulsed excimer laser annealing of titanium/cobalt/silicon stack at high fluence of 0.6 J/cm 2. The highly textured CoTi suicide is monocrystalline and fully coherent with the Si(111) plane of the substrate but has a large amount of microstructural defects. The constitutional supercooling phenomenon is the solidification mechanism responsible for the highly textured CoTi silicide. The incomplete crystallization shown by the presence of the amorphous CoTi silicide is attributed to a high concentration of titanium impurity. © 2004 The Electrochemical Society. All rights reserved.<p /><p>Language: en</p>",
language="en",
issn="1099-0062",
doi="10.1149/1.1788612",
url="http://dx.doi.org/10.1149/1.1788612"
}