@article{ref1,
title="Processes of mixing in multilayered periodic compositions of Mo/Si under action of an irradiation by ions of Ar+",
journal="Metallofizika i Noveishie Tekhnologii",
year="2007",
author="Zubarev, E.M. and Mel'nyk, V.P. and Kondratenko, V.V. and Pen'kov, O.V. and Ponomarenko, O.G. and Roma-Nyuk, B.M. and Sevryukova, V.A.",
volume="29",
number="12",
pages="1555-1570",
abstract="The initial stages of ion-beam mixing and phase formation in Mo/Si multilayers irradiated by argon ions with the energy of 175 keV are studied by methods of small-angle X-ray diffractometry and cross-section electron microscopy. As revealed, the irradiation leads to both the increase of an interlayer suicide-phase thickness and the decrease of a multilayer period. On both interface boundaries, decrease of the multilayer period and increase of the interlayer silicide-phase thickness depend linearly on the irradiation doze. Average chemical composition of the interlayer silicide phase corresponds to the Si-to-Mo atomic ratio of 4:1. Mentioned salient features of the ion-beam mixing at the initial stages are interpreted according to conception of mixing in subcascades of atomic collisions.<p /><p>Language: uk</p>",
language="uk",
issn="1024-1809",
doi="",
url="http://dx.doi.org/"
}