@article{ref1,
title="Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength",
journal="Optics letters",
year="2008",
author="Kjornrattanawanich, B. and Windt, D.L. and Seely, J.F.",
volume="33",
number="9",
pages="965-967",
abstract="Si/Gd multilayers designed as narrowband reflective coatings near 63 nm were developed. The highest peak reflectance of 26.2% at a 5° incident angle was obtained at 62 nm, and the spectral bandwidth was 7.3 nm FWHM. The fits for x-ray and extreme ultraviolet reflectance data of Si/Gd multilayers indicate the possibility of suicide formation at the Si-Gd interfaces. B4C, W, and SiN were deposited as interface barrier layers to improve the reflectance of Si/Gd multilayers. More than an 8% increase in reflectance was observed from the interface-engineered Si/W/Gd and Si/B4C/Gd multilayers. © 2008 Optical Society of America.<p /><p>Language: en</p>",
language="en",
issn="0146-9592",
doi="10.1364/OL.33.000965",
url="http://dx.doi.org/10.1364/OL.33.000965"
}