%0 Journal Article
%T Processes of mixing in multilayered periodic compositions of Mo/Si under action of an irradiation by ions of Ar+
%J Metallofizika i Noveishie Tekhnologii
%D 2007
%A Zubarev, E.M.
%A Mel'nyk, V.P.
%A Kondratenko, V.V.
%A Pen'kov, O.V.
%A Ponomarenko, O.G.
%A Roma-Nyuk, B.M.
%A Sevryukova, V.A.
%V 29
%N 12
%P 1555-1570
%X The initial stages of ion-beam mixing and phase formation in Mo/Si multilayers irradiated by argon ions with the energy of 175 keV are studied by methods of small-angle X-ray diffractometry and cross-section electron microscopy. As revealed, the irradiation leads to both the increase of an interlayer suicide-phase thickness and the decrease of a multilayer period. On both interface boundaries, decrease of the multilayer period and increase of the interlayer silicide-phase thickness depend linearly on the irradiation doze. Average chemical composition of the interlayer silicide phase corresponds to the Si-to-Mo atomic ratio of 4:1. Mentioned salient features of the ion-beam mixing at the initial stages are interpreted according to conception of mixing in subcascades of atomic collisions.<p /><p>Language: uk</p>
%G uk
%I 
%@ 1024-1809
%U http://dx.doi.org/