TY  - JOUR
PY  - 2001//
TI  - Variation of the Secondary-Emission Properties of the Surface of Single Crystals of Silicon under Conditions of Ion Implantation and Subsequent Annealing
JO  - Journal of Communications Technology and Electronics
A1  - Rysbaev, A.S.
SP  - 814
EP  - 816
VL  - 46
IS  - 7
N2  - <p>[Abstract unavailable]</p> <p>Language: en</p>
LA  - en
SN  - 1064-2269
UR  - http://dx.doi.org/
ID  - ref1
ER  -