TY  - JOUR
PY  - 2007//
TI  - Processes of mixing in multilayered periodic compositions of Mo/Si under action of an irradiation by ions of Ar+
JO  - Metallofizika i Noveishie Tekhnologii
A1  - Zubarev, E.M.
A1  - Mel'nyk, V.P.
A1  - Kondratenko, V.V.
A1  - Pen'kov, O.V.
A1  - Ponomarenko, O.G.
A1  - Roma-Nyuk, B.M.
A1  - Sevryukova, V.A.
SP  - 1555
EP  - 1570
VL  - 29
IS  - 12
N2  - The initial stages of ion-beam mixing and phase formation in Mo/Si multilayers irradiated by argon ions with the energy of 175 keV are studied by methods of small-angle X-ray diffractometry and cross-section electron microscopy. As revealed, the irradiation leads to both the increase of an interlayer suicide-phase thickness and the decrease of a multilayer period. On both interface boundaries, decrease of the multilayer period and increase of the interlayer silicide-phase thickness depend linearly on the irradiation doze. Average chemical composition of the interlayer silicide phase corresponds to the Si-to-Mo atomic ratio of 4:1. Mentioned salient features of the ion-beam mixing at the initial stages are interpreted according to conception of mixing in subcascades of atomic collisions.<p /> <p>Language: uk</p>
LA  - uk
SN  - 1024-1809
UR  - http://dx.doi.org/
ID  - ref1
ER  -