TY  - JOUR
PY  - 2008//
TI  - Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength
JO  - Optics letters
A1  - Kjornrattanawanich, B.
A1  - Windt, D.L.
A1  - Seely, J.F.
SP  - 965
EP  - 967
VL  - 33
IS  - 9
N2  - Si/Gd multilayers designed as narrowband reflective coatings near 63 nm were developed. The highest peak reflectance of 26.2% at a 5° incident angle was obtained at 62 nm, and the spectral bandwidth was 7.3 nm FWHM. The fits for x-ray and extreme ultraviolet reflectance data of Si/Gd multilayers indicate the possibility of suicide formation at the Si-Gd interfaces. B4C, W, and SiN were deposited as interface barrier layers to improve the reflectance of Si/Gd multilayers. More than an 8% increase in reflectance was observed from the interface-engineered Si/W/Gd and Si/B4C/Gd multilayers. © 2008 Optical Society of America.<p /> <p>Language: en</p>
LA  - en
SN  - 0146-9592
UR  - http://dx.doi.org/10.1364/OL.33.000965
ID  - ref1
ER  -